Company Overview
Zolixtech is a technology company specializing in the R&D and manufacturing of precision sensors and instrumentation. The core business focuses on providing online particle contamination monitoring equipment for high-pressure Bulk Gas and Specialty Gas in semiconductor Front-End manufacturing. The flagship product, ZHGC-101-01 inline high-pressure gas particle counter, is primarily applied in 12-inch wafer fabs for 14nm and advanced node production lines, meeting the testing requirements of SEMI F70 and C97 standards.
1. Core Business and Technology Roadmap
In semiconductor manufacturing processes (such as lithography and CVD), the cleanliness of process gases directly impacts wafer yield. The operating pressure of gas supply lines (like N2, Ar) is typically 100-150 psig. Traditional atmospheric particle counters require an external pressure reducer when testing high-pressure gases, a process prone to generating mechanical friction particles that distort real data.
Zolixtech’s technology roadmap is to achieve direct sensor connection to high-pressure pipelines through a high-pressure resistant optical cavity design.
Technical Capability Boundaries:
- Eliminates secondary particles (0.1-0.5μm pseudo-particles) generated by pressure reducers.
- Enables continuous online sampling of genuine pipeline particles in a 150 psig pressure environment.
2. Core Products and Parameters
Zolixtech primarily provides precision instruments that meet semiconductor high-purity gas monitoring requirements. Key technical parameters:
- Pressure Tolerance: 150 psig (1.0 MPa) direct connection, no pressure reducer required.
- Minimum Detectable Size: 0.1 μm / 100 nm (Meets SEMI C97 Grade 1/0.1 requirement of ≥0.1 μm).
- Sampling Flow Control: 0.1 CFM / 2.83 LPM constant flow (error ≤ ±5%, complies with SEMI F70).
- Data Interfaces: Supports industry-standard interfaces like 4-20mA, RS-485 (Meets ALCOA principles for automated data recording).
3. Application Scenarios and System Integration
Zolixtech’s inline particle counters are mainly installed at the following semiconductor facility and process nodes:
- Bulk Gas Valve Manifold Boxes (VMB / VMP): Monitoring main line gas cleanliness.
- Point of Use (POU): Located downstream of terminal filters, monitoring final gas state before entering the process chamber.
System Integration:
The equipment supports real-time transmission of particle concentration data (e.g., 0.1μm, 0.3μm channels) via standard industrial protocols to the Fab’s FMCS (Facility Management and Control System) or FDC (Fault Detection and Classification) system, providing foundational data for yield anomaly analysis.
4. Quality System and Calibration Standards
As a precision instrumentation manufacturer, Zolixtech’s quality system is built on international metrology standards:
- Calibration Standards: Optical calibration and flow calibration of factory equipment comply with the ISO 21501-4 standard (Light scattering airborne particle counter for clean spaces).
- Traceability: Standard testing particles and calibration procedures are NIST (National Institute of Standards and Technology) traceable.
- Technical Support: Provides 24-hour technical response and original factory calibration services to guarantee continuous uptime for fab monitoring equipment.