PRODUCTS & APPLICATIONS
Flagship Product & Applications
Discover the ZHGC-101 and our comprehensive solutions for semiconductor wafer fabs, high purity gas manufacturers, and more.
ZHGC-101-02 Explosion-proof High Pressure Particle Counter
Purpose-built for online monitoring of reactive and corrosive specialty gases (e.g., HCl, NH3, Silane) in advanced semiconductor fabs. The ZHGC-101-02 employs an exclusive explosion-proof safety containment vessel and a patented passive laser cavity, physically isolating hazardous gases and eliminating the fatal flaws of corrosion and leakage found in traditional sensors. Delivering an ultimate detection sensitivity of 0.1μm @ 0.1cfm in harsh environments, it instantly intercepts nanoscale particle contamination, preventing catastrophic wafer scrap and serving as the ultimate solution for high-spec facility gas monitoring.
ZHGC-101-01 In-line High Pressure Gas Particle Counter
In-line high-pressure particle counter engineered for wafer fab front-end gas delivery systems. Features a proprietary passive laser cavity achieving 0.1 μm @ 0.1 cfm sensitivity at 40–150 psig. Compatible with N2, Ar, He, and other UHP inert gases. NIST-traceable calibration.
Competitive Analysis
Benchmarking Superiority
Meeting or exceeding international advanced standards in key performance indicators.
* 数据来源：国家法定计量检定机构 (SIMT) 测试报告及第三方公开市场数据
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Contact Sales
Interested in the ZHGC series or full-stack gas detection solutions? Let us know your requirements.
sales@zolixtech.com
Headquarters
Room 1425, 14F, Chuangxinghui Finance Building, No. 777 Guanggu 3rd Rd, Wuhan, Hubei