Ex-Certified
ZHGC-101-02 Explosion-proof High Pressure Particle Counter
Purpose-built for online monitoring of reactive and corrosive specialty gases (e.g., HCl, NH3, Silane) in advanced semiconductor fabs. The ZHGC-101-02 employs an exclusive explosion-proof safety containment vessel and a patented passive laser cavity, physically isolating hazardous gases and eliminating the fatal flaws of corrosion and leakage found in traditional sensors. Delivering an ultimate detection sensitivity of 0.1μm @ 0.1cfm in harsh environments, it instantly intercepts nanoscale particle contamination, preventing catastrophic wafer scrap and serving as the ultimate solution for high-spec facility gas monitoring.
Core Advantages
Ultimate Safety & Zero-Maintenance
- The explosion-proof containment vessel completely isolates toxic, flammable, or corrosive gases, eliminating the risk of gas leaks and explosions at the physical level.
- The patented passive cavity prevents core optical components from contacting reactive gases, dropping high-frequency replacement rates to zero and achieving true 'zero-maintenance'.
Safeguarding Advanced Node Yield
- Achieves 0.1μm extreme precision real-time monitoring within fully pressurized pipelines (40-150 psig).
- Captures nanoscale contamination fluctuations within seconds, triggering instantaneous alarms to shut off valves before polluted gas enters the reaction chamber, saving millions of dollars in wafer scrap.
Seamless Fab IoT Integration
- Provides rich industrial data interfaces (RS-485/Ethernet), feeding data directly into the semiconductor fab's MES or SCADA platforms.
- Generates complete, immutable electronic Audit Trail records to easily navigate the strictest quality and compliance audits.
Core Applications
Reactive Gas Pipeline Online Monitoring
Pain Point: In 3nm/2nm processes using highly corrosive or reactive specialty gases like HCl and Silane, traditional particle counters easily corrode and short-circuit, triggering catastrophic safety incidents and line stoppages.
Solution: Deploy the ZHGC-102 with its explosion-proof safety containment. Its passive cavity entirely avoids corrosion, providing continuous, safe 0.1μm particle online monitoring to ensure uninterrupted production.
Hazardous Gas Distribution System (VMB) Qualification
Pain Point: Traditional offline sampling for the qualification of newly built or maintained flammable/explosive gas lines carries extreme risk and takes weeks, severely delaying capacity ramp-up.
Solution: Outputs NIST-traceable compliance particle data directly online, eliminating high-risk manual offline sampling and slashing the certification cycle of high-risk gas lines by over 70%.
Explosion-proof Zone Monitoring
Pain Point: Certain specialty chemical synthesis or gas packaging facilities have strict explosion-proof requirements that strictly prohibit conventional detection instruments.
Solution: A specially crafted reinforced explosion-proof chassis fundamentally eliminates ignition sources, perfectly satisfying the stringent safety access requirements of Zone areas in specialty gas facilities.
Technical Specifications
Technical Specifications
Physical & Electrical Specs
Get in Touch
Contact Sales
Interested in the ZHGC series or full-stack gas detection solutions? Let us know your requirements.
sales@zolixtech.com
Headquarters
Room 1425, 14F, Chuangxinghui Finance Building, No. 777 Guanggu 3rd Rd, Wuhan, Hubei